Analytical Scanning Electron Microscopy (318529)
Winter Semester 2025
Wayne D. Kaplan
This course is dedicated to general principles and instrumentation of scanning electron microscopy (SEM) and relevant analytical techniques based on SEM: Electron Probe X-ray Microanalysis (EPMA) and Electron Back Scatter Diffraction (EBSD). The goals of the course are to provide the graduate student with a fundamental understanding of imaging, resolution, and detection when using an analytical scanning electron microscope.
The lectures will include:
· Introduction & review of basics
· Electron optics
· Electron scattering
· Electron emission & detection
· Image contrast & signal processing
· Energy and wavelength dispersive spectroscopy
· Electron backscattered diffraction
· Focused ion beam systems
- Teacher: וויין קפלן